Методы получения высокого и сверхвысокого вакуума. Дикарев Ю.И - 46 стр.

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ɋɨɞɟɪɠɚɧɢɟ
ȼɜɟɞɟɧɢɟ .....................................................................................................
1. Ɇɟɯɚɧɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɵɫɨɤɨɝɨ ɢ
ɫɜɟɪɯɜɵɫɨɤɨɝɨ ɜɚɤɭɭɦɚ .........................................................................
1.1. Ɇɨɥɟɤɭɥɹɪɧɚɹ ɨɬɤɚɱɤɚ. Ɍɭɪɛɨɦɨɥɟɤɭɥɹɪɧɵɟ ɧɚɫɨɫɵ ................
1.2. ɉɚɪɨɫɬɪɭɣɧɚɹ ɨɬɤɚɱɤɚ ...................................................................
2. Ɏɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɚɤɭɭɦɚ ...............................
2.1. ɂɨɧɧɚɹ ɨɬɤɚɱɤɚ ..............................................................................
2.2. ɏɟɦɨɫɨɪɛɰɢɨɧɧɚɹ ɨɬɤɚɱɤɚ ............................................................
2.3. Ʉɪɢɨɚɞɫɨɪɛɰɢɨɧɧɚɹ ɨɬɤɚɱɤɚ ........................................................
2.4. Ʉɪɢɨɤɨɧɞɟɧɫɚɰɢɨɧɧɚɹ ɨɬɤɚɱɤɚ .....................................................
3. Ʌɚɛɨɪɚɬɨɪɧɵɟ ɪɚɛɨɬɵ ɩɨ ɢɡɭɱɟɧɢɸ
ɩɚɪɨɫɬɪɭɣɧɨɣ ɨɬɤɚɱɤɢ ...........................................................................
Ʉɨɧɬɪɨɥɶɧɵɟ ɜɨɩɪɨɫɵ ...............................................................................
Ʌɢɬɟɪɚɬɭɪɚ ..................................................................................................
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                                                  ɋɨɞɟɪɠɚɧɢɟ

ȼɜɟɞɟɧɢɟ .....................................................................................................    3

1. Ɇɟɯɚɧɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɵɫɨɤɨɝɨ ɢ
ɫɜɟɪɯɜɵɫɨɤɨɝɨ ɜɚɤɭɭɦɚ .........................................................................                   4
   1.1. Ɇɨɥɟɤɭɥɹɪɧɚɹ ɨɬɤɚɱɤɚ. Ɍɭɪɛɨɦɨɥɟɤɭɥɹɪɧɵɟ ɧɚɫɨɫɵ ................                                           4
   1.2. ɉɚɪɨɫɬɪɭɣɧɚɹ ɨɬɤɚɱɤɚ ...................................................................                  7

2. Ɏɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɚɤɭɭɦɚ ...............................                                    15
   2.1. ɂɨɧɧɚɹ ɨɬɤɚɱɤɚ ..............................................................................            16
   2.2. ɏɟɦɨɫɨɪɛɰɢɨɧɧɚɹ ɨɬɤɚɱɤɚ ............................................................                     17
   2.3. Ʉɪɢɨɚɞɫɨɪɛɰɢɨɧɧɚɹ ɨɬɤɚɱɤɚ ........................................................                       24
   2.4. Ʉɪɢɨɤɨɧɞɟɧɫɚɰɢɨɧɧɚɹ ɨɬɤɚɱɤɚ .....................................................                        27

3. Ʌɚɛɨɪɚɬɨɪɧɵɟ ɪɚɛɨɬɵ ɩɨ ɢɡɭɱɟɧɢɸ
ɩɚɪɨɫɬɪɭɣɧɨɣ ɨɬɤɚɱɤɢ ...........................................................................                 30

Ʉɨɧɬɪɨɥɶɧɵɟ ɜɨɩɪɨɫɵ ...............................................................................              45

Ʌɢɬɟɪɚɬɭɪɚ ..................................................................................................    45




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