Методы получения высокого и сверхвысокого вакуума. Дикарев Ю.И - 35 стр.

    3.2.3. ɉɭɫɤ ɢ ɨɫɬɚɧɨɜɤɚ

     Ⱦɥɹ ɩɭɫɤɚ ɧɚɫɨɫɚ ɧɟɨɛɯɨɞɢɦɨ:
    – ɜɤɥɸɱɢɬɶ ɧɚɫɨɫ ɩɪɟɞɜɚɪɢɬɟɥɶɧɨɝɨ ɪɚɡɪɟɠɟɧɢɹ ɢ ɨɬɤɪɵɬɶ ɜɟɧɬɢɥɶ.
ȼɟɧɬɢɥɶ ɨɬɤɪɵɜɚɬɶ ɩɨɫɬɟɩɟɧɧɨ, ɧɟɨɛɯɨɞɢɦɨ, ɱɬɨɛɵ ɢɡ ɜɵɩɭɫɤɧɨɝɨ ɩɚɬɪɭɛ-
ɤɚ ɧɚɫɨɫɚ ɧɟ ɜɵɛɪɚɫɵɜɚɥɨ ɦɚɫɥɨ;
    – ɨɬɤɚɱɚɜ ɫɢɫɬɟɦɭ ɞɨ ɞɚɜɥɟɧɢɹ ɩɨɪɹɞɤɚ 0,5 ɉɚ, ɩɭɫɬɢɬɶ ɨɯɥɚɠɞɚɸɳɭɸ
ɜɨɞɭ ɜ ɧɚɫɨɫ ɢ ɜɤɥɸɱɢɬɶ ɷɥɟɤɬɪɨɧɚɝɪɟɜɚɬɟɥɶ;
    – ɧɚɫɨɫ ɧɚɱɢɧɚɟɬ ɪɚɛɨɬɚɬɶ ɱɟɪɟɡ 30–40 ɦɢɧ ɩɨɫɥɟ ɜɤɥɸɱɟɧɢɹ
ɩɨɞɨɝɪɟɜɚ. Ɇɨɦɟɧɬ ɧɚɱɚɥɚ ɪɚɛɨɬɵ ɦɨɠɟɬ ɛɵɬɶ ɨɩɪɟɞɟɥɟɧ ɩɨ ɪɟɡɤɨɦɭ
ɭɥɭɱɲɟɧɢɸ ɜɚɤɭɭɦɚ.
     Ⱦɥɹ ɨɫɬɚɧɨɜɤɢ ɧɚɫɨɫɚ ɫɥɟɞɭɟɬ:
    – ɜɵɤɥɸɱɢɬɶ ɩɨɞɨɝɪɟɜ;
    – ɤɨɪɩɭɫ ɧɚɫɨɫɚ ɨɯɥɚɞɢɬɶ ɞɨ ɬɟɦɩɟɪɚɬɭɪɵ 50–70 °ɋ;
    – ɡɚɤɪɵɬɶ ɜɟɧɬɢɥɶ ɩɪɟɞɜɚɪɢɬɟɥɶɧɨɝɨ ɪɚɡɪɟɠɟɧɢɹ;
    – ɜɵɤɥɸɱɢɬɶ ɧɚɫɨɫ ɩɪɟɞɜɚɪɢɬɟɥɶɧɨɝɨ ɪɚɡɪɟɠɟɧɢɹ;
    – ɩɟɪɟɤɪɵɬɶ ɩɨɞɚɱɭ ɨɯɥɚɠɞɚɸɳɟɣ ɜɨɞɵ.

    3.2.4. ɗɤɫɩɥɭɚɬɚɰɢɹ

    ȼ ɩɪɨɰɟɫɫɟ ɷɤɫɩɥɭɚɬɚɰɢɢ ɧɟɨɛɯɨɞɢɦɨ:
    – ɫɥɟɞɢɬɶ ɡɚ ɜɟɥɢɱɢɧɨɣ ɨɫɬɚɬɨɱɧɨɝɨ ɞɚɜɥɟɧɢɹ ɜ ɫɢɫɬɟɦɟ. ȼ ɫɥɭɱɚɟ ɪɟɡ-
ɤɨɝɨ ɩɨɜɵɲɟɧɢɹ ɞɚɜɥɟɧɢɹ ɜ ɪɟɡɭɥɶɬɚɬɟ ɩɨɹɜɥɟɧɢɹ ɬɟɱɢ ɜ ɫɢɫɬɟɦɟ, ɬɟɱɶ
ɫɥɟɞɭɟɬ ɧɟɦɟɞɥɟɧɧɨ ɭɫɬɪɚɧɢɬɶ, ɚ ɟɫɥɢ ɷɬɨ ɧɟɜɨɡɦɨɠɧɨ ɩɪɢ ɪɚɛɨɬɚɸɳɟɦ
ɧɚɫɨɫɟ, ɬɨ ɟɝɨ ɧɟɨɛɯɨɞɢɦɨ ɨɫɬɚɧɨɜɢɬɶ;
    – ɧɟ ɞɨɩɭɫɤɚɬɶ ɩɨɩɚɞɚɧɢɹ ɚɬɦɨɫɮɟɪɧɨɝɨ ɜɨɡɞɭɯɚ ɜ ɝɨɪɹɱɢɣ ɧɚɫɨɫ, ɷɬɨ
ɩɪɢɜɨɞɢɬ ɤ ɩɨɪɱɟ ɦɚɫɥɚ. ɉɪɢɡɧɚɤɚɦɢ ɩɨɪɱɢ ɦɚɫɥɚ ɦɨɠɟɬ ɫɥɭɠɢɬɶ ɢɡɦɟɧɟ-
ɧɢɟ ɟɝɨ ɰɜɟɬɚ ɢ ɩɨɹɜɥɟɧɢɹ ɪɟɡɤɨɝɨ ɡɚɩɚɯɚ. ȿɫɥɢ ɩɨɫɥɟ ɧɟɨɞɧɨɤɪɚɬɧɨɝɨ ɩɨ-
ɩɚɞɚɧɢɹ ɜɨɡɞɭɯɚ ɜ ɝɨɪɹɱɢɣ ɧɚɫɨɫ ɨɧ ɭɯɭɞɲɚɟɬ ɫɜɨɢ ɜɚɤɭɭɦɧɵɟ ɯɚɪɚɤɬɟɪɢ-
ɫɬɢɤɢ, ɬɨ ɧɟɨɛɯɨɞɢɦɨ ɫɥɢɬɶ ɦɚɫɥɨ, ɧɚɫɨɫ ɪɚɡɨɛɪɚɬɶ ɢ ɩɪɨɦɵɬɶ. Ɂɚɬɟɦ ɡɚ-
ɥɢɬɶ ɧɨɜɨɟ ɦɚɫɥɨ;
    – ɫɥɟɞɢɬɶ ɡɚ ɬɟɦɩɟɪɚɬɭɪɨɣ ɨɯɥɚɠɞɚɸɳɟɣ ɜɨɞɵ ɧɚ ɜɵɯɨɞɟ ɧɚɫɨɫɚ. Ɍɟɦ-
ɩɟɪɚɬɭɪɚ ɧɟ ɞɨɥɠɧɚ ɩɪɟɜɵɲɚɬɶ 30 °ɋ. ɉɟɪɟɝɪɟɜ ɧɚɫɨɫɚ ɜɟɞɟɬ ɤ ɩɨɪɱɟ ɦɚɫɥɚ
ɢ ɩɨɜɵɲɚɟɬ ɟɝɨ ɭɧɨɫ ɢɡ ɧɚɫɨɫɚ;
    – ɩɨɞɞɟɪɠɢɜɚɬɶ ɩɨɫɬɨɹɧɧɨɣ ɜɟɥɢɱɢɧɭ ɩɨɞɨɝɪɟɜɚ. ɋɧɢɠɟɧɢɟ ɦɨɳɧɨɫɬɢ
ɩɨɞɨɝɪɟɜɚ ɜɟɞɟɬ ɤ ɭɦɟɧɶɲɟɧɢɸ ɛɵɫɬɪɨɬɵ ɨɬɤɚɱɤɢ.
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