Методы получения высокого и сверхвысокого вакуума. Дикарев Ю.И - 42 стр.

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ɩɚɞ ɞɚɜɥɟɧɢɣ ɧɚ ɧɢɯ ɫɨɨɬɜɟɬɫɬɜɟɧɧɨ ɭɜɟɥɢɱɢɜɚɟɬɫɹ ɞɨ ɜɟɥɢɱɢɧɵ ɦɚɤɫɢ-
ɦɚɥɶɧɨɝɨ ɜɵɩɭɫɤɧɨɝɨ ɞɚɜɥɟɧɢɹ (ɧɟ ɩɪɟɜɵɲɚɸɳɟɝɨ 26 ɉɚ).
Ɉɩɪɟɞɟɥɢɦ ɬɟɨɪɟɬɢɱɟɫɤɭɸ ɛɵɫɬɪɨɬɭ ɞɟɣɫɬɜɢɹ (S
ɬ
) ɧɚɫɨɫɚ ɜ ɩɪɟɞɩɨɥɨ-
ɠɟɧɢɢ, ɱɬɨ ɜɫɟ ɦɨɥɟɤɭɥɵ, ɩɨɞɥɟɬɟɜɲɢɟ ɤ ɤɨɥɶɰɟɜɨɣ ɳɟɥɢ ɦɟɠɞɭ ɜɟɪɯɧɢɦ
ɫɨɩɥɨɦ ɢ ɤɨɪɩɭɫɨɦ ɧɚɫɨɫɚ, ɡɚɯɜɚɬɹɬɫɹ ɢ ɭɧɟɫɭɬɫɹ ɫɬɪɭɟɣ ɦɚɫɥɚ. Ⱦɥɹ ɪɚɫɱɟ-
ɬɚ S
ɬ
ɧɚɫɨɫɚ ɜ ɧɚɱɚɥɟ ɡɚɩɢɲɟɦ ɟɝɨ ɩɪɨɢɡɜɨɞɢɬɟɥɶɧɨɫɬɶ ɤɚɤ ɪɚɡɧɨɫɬɶ ɩɪɹ-
ɦɨɝɨ ɢ ɨɛɪɚɬɧɨɝɨ ɩɨɬɨɤɨɜ:
Q = Q
n
– Q
ɨɛ
, ɦ
3
ɉɚ/ɫ, (10)
ɝɞɟ ɩɪɹɦɨɣ ɩɨɬɨɤ Q
n
= V
1
·F ·P, (11)
ɨɛɪɚɬɧɵɣ ɩɨɬɨɤ Q
ɨɛ
= V
1
·F ·P
ɨɛ
, (12)
Ɋ – ɞɚɜɥɟɧɢɟ ɨɬɤɚɱɢɜɚɟɦɨɝɨ ɝɚɡɚ ɭ ɜɯɨɞɚ ɜ ɧɚɫɨɫ,
Ɋ
ɨɛ
– ɨɛɪɚɬɧɨɟ ɞɚɜɥɟɧɢɟ ɜ ɰɟɧɬɪɟ ɫɬɪɭɢ ɨɬɤɚɱɢɜɚɟɦɨɝɨ ɝɚɡɚ,
F – ɩɥɨɳɚɞɶ ɤɨɥɶɰɟɜɨɝɨ ɡɚɡɨɪɚ ɦɟɠɞɭ ɤɨɪɩɭɫɨɦ ɧɚɫɨɫɚ ɢ ɧɚɪɭɠɧɵɦ
ɞɢɚɦɟɬɪɨɦ ɫɨɩɥɚ, ɦ
3
22
(
4
kc
FDd)
S
, (13)
D
k
, d
c
– ɞɢɚɦɟɬɪɵ ɤɨɪɩɭɫɚ (ɜɧɭɬɪ.) ɢ ɫɨɩɥɚ (ɜɧɟɲɧ.),
V
1
– ɨɛɴɟɦ ɝɚɡɚ, ɭɞɚɪɹɸɳɢɣɫɹ ɨ ɟɞɢɧɢɰɭ ɩɨɜɟɪɯɧɨɫɬɢ ɜ ɟɞɢɧɢɰɭ ɜɪɟ-
ɦɟɧɢ
3
1
,/(
42
ap
RT
V
2
)
ɦ
ɫɦ
Ɇ
X
S
. (14)
ɉɨɥɭɱɟɧɧɨɟ ɜɵɪɚɠɟɧɢɟ ɧɟ ɡɚɜɢɫɢɬ ɨɬ ɞɚɜɥɟɧɢɹ ɢ ɨɩɪɟɞɟɥɹɟɬ ɦɚɤɫɢ-
ɦɚɥɶɧɭɸ ɛɵɫɬɪɨɬɭ ɞɟɣɫɬɜɢɹ ɢɞɟɚɥɶɧɨɝɨ ɜɚɤɭɭɦɧɨɝɨ ɧɚɫɨɫɚ, ɨɬɤɚɱɢɜɚɸɳɟ-
ɝɨ ɜɫɟ ɦɨɥɟɤɭɥɵ ɝɚɡɚ, ɤɨɬɨɪɵɟ ɩɨɩɚɞɚɸɬ ɜ ɧɟɝɨ ɱɟɪɟɡ ɜɯɨɞɧɨɟ ɨɬɜɟɪɫɬɢɟ.
ȼ (14) ɱɟɪɟɡ
X
ɚɪ
ɨɛɨɡɧɚɱɟɧɚ ɫɪɟɞɧɟɚɪɢɮɦɟɬɢɱɟɫɤɚɹ ɫɤɨɪɨɫɬɶ ɝɚɡɚ;
Ɇ – ɦɨɥɟɤɭɥɹɪɧɚɹ ɦɚɫɫɚ ɝɚɡɚ; m – ɦɚɫɫɚ ɦɨɥɟɤɭɥɵ ɝɚɡɚ;
R – ɭɧɢɜɟɪɫɚɥɶɧɚɹ ɝɚɡɨɜɚɹ ɩɨɫɬɨɹɧɧɚɹ, R = kN
a
= 8,31·10
3
Ⱦɠ/(ɤɦɨɥɶ).
N
a
– ɱɢɫɥɨ Ⱥɜɨɝɚɞɪɨ, N
a
= M/m = 6,02·10
26
ɤɦɨɥɶ
-1
.
ɉɪɢ ɡɧɚɱɟɧɢɢ ɜɩɭɫɤɧɨɝɨ ɞɚɜɥɟɧɢɹ, ɪɚɜɧɨɝɨ ɩɪɟɞɟɥɶɧɨɦɭ Ɋ
ɩɪ
, ɛɵɫɬɪɨɬɚ
ɨɬɤɚɱɤɢ ɪɚɜɧɚ ɧɭɥɸ. Ɍɨɝɞɚ
V
1
·F·P
ɩɪ.
= V
1
·F·P
ɩɪ.
ɢ Ɋ
ɨɛ
= Ɋ
ɩɪ.
(15)
Ⱦɥɹ ɨɩɪɟɞɟɥɟɧɢɹ ɢɞɟɚɥɶɧɨɣ ɛɵɫɬɪɨɬɵ ɨɬɤɚɱɤɢ ɧɟɨɛɯɨɞɢɦɨ (10) ɪɚɡɞɟ-
ɥɢɬɶ ɧɚ Ɋ, ɱɬɨ ɫ ɭɱɟɬɨɦ (6) ɞɚɟɬ
3
1
(1 ), /
ɩɪ
T
Ɋ
Q
SVF
ɦ
ɫ
PP
. (16)
42
ɩɚɞ ɞɚɜɥɟɧɢɣ ɧɚ ɧɢɯ ɫɨɨɬɜɟɬɫɬɜɟɧɧɨ ɭɜɟɥɢɱɢɜɚɟɬɫɹ ɞɨ ɜɟɥɢɱɢɧɵ ɦɚɤɫɢ-
ɦɚɥɶɧɨɝɨ ɜɵɩɭɫɤɧɨɝɨ ɞɚɜɥɟɧɢɹ (ɧɟ ɩɪɟɜɵɲɚɸɳɟɝɨ 26 ɉɚ).
    Ɉɩɪɟɞɟɥɢɦ ɬɟɨɪɟɬɢɱɟɫɤɭɸ ɛɵɫɬɪɨɬɭ ɞɟɣɫɬɜɢɹ (Sɬ) ɧɚɫɨɫɚ ɜ ɩɪɟɞɩɨɥɨ-
ɠɟɧɢɢ, ɱɬɨ ɜɫɟ ɦɨɥɟɤɭɥɵ, ɩɨɞɥɟɬɟɜɲɢɟ ɤ ɤɨɥɶɰɟɜɨɣ ɳɟɥɢ ɦɟɠɞɭ ɜɟɪɯɧɢɦ
ɫɨɩɥɨɦ ɢ ɤɨɪɩɭɫɨɦ ɧɚɫɨɫɚ, ɡɚɯɜɚɬɹɬɫɹ ɢ ɭɧɟɫɭɬɫɹ ɫɬɪɭɟɣ ɦɚɫɥɚ. Ⱦɥɹ ɪɚɫɱɟ-
ɬɚ Sɬ ɧɚɫɨɫɚ ɜ ɧɚɱɚɥɟ ɡɚɩɢɲɟɦ ɟɝɨ ɩɪɨɢɡɜɨɞɢɬɟɥɶɧɨɫɬɶ ɤɚɤ ɪɚɡɧɨɫɬɶ ɩɪɹ-
ɦɨɝɨ ɢ ɨɛɪɚɬɧɨɝɨ ɩɨɬɨɤɨɜ:
                      Q = Qn – Qɨɛ, ɦ3ɉɚ/ɫ,                         (10)
ɝɞɟ ɩɪɹɦɨɣ ɩɨɬɨɤ        Qn = V1 ·F ·P,                              (11)
     ɨɛɪɚɬɧɵɣ ɩɨɬɨɤ     Qɨɛ = V1 ·F ·Pɨɛ,                           (12)
    Ɋ – ɞɚɜɥɟɧɢɟ ɨɬɤɚɱɢɜɚɟɦɨɝɨ ɝɚɡɚ ɭ ɜɯɨɞɚ ɜ ɧɚɫɨɫ,
    Ɋɨɛ – ɨɛɪɚɬɧɨɟ ɞɚɜɥɟɧɢɟ ɜ ɰɟɧɬɪɟ ɫɬɪɭɢ ɨɬɤɚɱɢɜɚɟɦɨɝɨ ɝɚɡɚ,
    F – ɩɥɨɳɚɞɶ ɤɨɥɶɰɟɜɨɝɨ ɡɚɡɨɪɚ ɦɟɠɞɭ ɤɨɪɩɭɫɨɦ ɧɚɫɨɫɚ ɢ ɧɚɪɭɠɧɵɦ
ɞɢɚɦɟɬɪɨɦ ɫɨɩɥɚ, ɦ3
                                S
                            F      ( Dk2  d c2 ) ,              (13)
                                 4
    Dk, dc – ɞɢɚɦɟɬɪɵ ɤɨɪɩɭɫɚ (ɜɧɭɬɪ.) ɢ ɫɨɩɥɚ (ɜɧɟɲɧ.),
    V1 – ɨɛɴɟɦ ɝɚɡɚ, ɭɞɚɪɹɸɳɢɣɫɹ ɨ ɟɞɢɧɢɰɭ ɩɨɜɟɪɯɧɨɫɬɢ ɜ ɟɞɢɧɢɰɭ ɜɪɟ-
ɦɟɧɢ
                                Xap           RT
                           V1                      , ɦ3 /(ɫ ˜ ɦ 2 ) . (14)
                                    4        2S Ɇ
     ɉɨɥɭɱɟɧɧɨɟ ɜɵɪɚɠɟɧɢɟ ɧɟ ɡɚɜɢɫɢɬ ɨɬ ɞɚɜɥɟɧɢɹ ɢ ɨɩɪɟɞɟɥɹɟɬ ɦɚɤɫɢ-
ɦɚɥɶɧɭɸ ɛɵɫɬɪɨɬɭ ɞɟɣɫɬɜɢɹ ɢɞɟɚɥɶɧɨɝɨ ɜɚɤɭɭɦɧɨɝɨ ɧɚɫɨɫɚ, ɨɬɤɚɱɢɜɚɸɳɟ-
ɝɨ ɜɫɟ ɦɨɥɟɤɭɥɵ ɝɚɡɚ, ɤɨɬɨɪɵɟ ɩɨɩɚɞɚɸɬ ɜ ɧɟɝɨ ɱɟɪɟɡ ɜɯɨɞɧɨɟ ɨɬɜɟɪɫɬɢɟ.
     ȼ (14) ɱɟɪɟɡ Xɚɪ ɨɛɨɡɧɚɱɟɧɚ ɫɪɟɞɧɟɚɪɢɮɦɟɬɢɱɟɫɤɚɹ ɫɤɨɪɨɫɬɶ ɝɚɡɚ;
     Ɇ – ɦɨɥɟɤɭɥɹɪɧɚɹ ɦɚɫɫɚ ɝɚɡɚ; m – ɦɚɫɫɚ ɦɨɥɟɤɭɥɵ ɝɚɡɚ;
     R – ɭɧɢɜɟɪɫɚɥɶɧɚɹ ɝɚɡɨɜɚɹ ɩɨɫɬɨɹɧɧɚɹ, R = kNa = 8,31·103 Ⱦɠ/(ɤɦɨɥɶ).
     Na – ɱɢɫɥɨ Ⱥɜɨɝɚɞɪɨ, Na = M/m = 6,02·1026 ɤɦɨɥɶ-1.
     ɉɪɢ ɡɧɚɱɟɧɢɢ ɜɩɭɫɤɧɨɝɨ ɞɚɜɥɟɧɢɹ, ɪɚɜɧɨɝɨ ɩɪɟɞɟɥɶɧɨɦɭ Ɋɩɪ, ɛɵɫɬɪɨɬɚ
ɨɬɤɚɱɤɢ ɪɚɜɧɚ ɧɭɥɸ. Ɍɨɝɞɚ
                        V1·F·Pɩɪ. = V1·F·Pɩɪ. ɢ Ɋɨɛ = Ɋɩɪ.            (15)
     Ⱦɥɹ ɨɩɪɟɞɟɥɟɧɢɹ ɢɞɟɚɥɶɧɨɣ ɛɵɫɬɪɨɬɵ ɨɬɤɚɱɤɢ ɧɟɨɛɯɨɞɢɦɨ (10) ɪɚɡɞɟ-
ɥɢɬɶ ɧɚ Ɋ, ɱɬɨ ɫ ɭɱɟɬɨɦ (6) ɞɚɟɬ
                             Q                Ɋ
                        ST        V1 ˜ F (1  ɩɪ ), ɦ3 / ɫ .          (16)
                             P                 P

                                      42

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