Методы получения высокого и сверхвысокого вакуума. Дикарев Ю.И - 15 стр.

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2. Ɏɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɚɤɭɭɦɚ
Ɏɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɚɤɭɭɦɚ ɩɨɡɜɨɥɹɸɬ ɫɨɡɞɚɜɚɬɶ
ɧɚɫɨɫɵ ɫ ɥɭɱɲɢɦɢ, ɱɟɦ ɭ ɦɟɯɚɧɢɱɟɫɤɢɯ, ɜɚɤɭɭɦɧɨ-ɬɟɯɧɢɱɟɫɤɢɦɢ ɩɨɤɚɡɚ-
ɬɟɥɹɦɢ. ɋɭɳɟɫɬɜɟɧɧɵɦ ɩɪɟɢɦɭɳɟɫɬɜɨɦ ɬɚɤɢɯ ɧɚɫɨɫɨɜ ɹɜɥɹɟɬɫɹ ɭɫɬɪɚɧɟɧɢɟ
ɡɚɝɪɹɡɧɟɧɢɹ ɨɬɤɚɱɢɜɚɟɦɨɝɨ ɨɛɴɟɦɚ ɩɚɪɚɦɢ ɪɚɛɨɱɢɯ ɠɢɞɤɨɫɬɟɣ, ɢɫɩɨɥɶɡɭɟ-
ɦɵɯ ɜ ɦɟɯɚɧɢɱɟɫɤɢɯ ɧɚɫɨɫɚɯ ɞɥɹ ɫɦɚɡɤɢ ɢ ɝɟɪɦɟɬɢɡɚɰɢɢ.
ɍɫɥɨɜɧɨɟ ɝɪɚɮɢɱɟɫɤɨɟ ɢɡɨɛɪɚɠɟɧɢɟ ɧɚɫɨɫɨɜ, ɪɚɛɨɬɚɸɳɢɯ ɧɚ ɩɪɢɧɰɢ-
ɩɚɯ ɮɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɨɣ ɨɬɤɚɱɤɢ, ɩɪɢɜɟɞɟɧɵ ɧɚ ɪɢɫ. 10, ɚ ɞɢɚɩɚɡɨɧɵ ɪɚɛɨ-
ɱɢɯ ɞɚɜɥɟɧɢɣ ɩɪɨɦɵɲɥɟɧɧɵɯ ɢ ɥɚɛɨɪɚɬɨɪɧɵɯ ɨɛɪɚɡɰɨɜ ɩɨɤɚɡɚɧɵ ɧɚ
ɪɢɫ. 11.
N
M
Ɋɢɫ. 10. ɍɫɥɨɜɧɵɟ ɝɪɚɮɢɱɟɫɤɨɟ ɢ ɬɟɤɫɬɨɜɨɟ (NA, NG, NC, NE, NM) ɢɡɨ-
ɛɪɚɠɟɧɢɹ ɧɚɫɨɫɨɜ (NAɚɞɫɨɪɛɰɢɨɧɧɵɣ, NG – ɝɟɬɬɟɪɧɵɣ, NC – ɤɪɢɨɫɨɪɛɰɢɨɧ-
ɧɵɣ,
NE – ɢɨɧɧɨ-ɫɨɪɛɰɢɨɧɧɵɣ, NM – ɦɚɝɧɢɬɨɪɚɡɪɹɞɧɵɣ)
Ɋɢɫ. 11. Ⱦɢɚɩɚɡɨɧɵ ɪɚɛɨɱɢɯ ɞɚɜɥɟɧɢɣ ɜɚɤɭɭɦɧɵɯ ɧɚɫɨɫɨɜ, ɪɚɛɨɬɚɸɳɢɯ ɧɚ ɮɢɡɢ-
ɤɨ-ɯɢɦɢɱɟɫɤɢɯ ɦɟɬɨɞɚɯ ɨɬɤɚɱɤɢ: ɫɩɥɨɲɧɚɹ ɥɢɧɢɹ - ɩɪɨɦɵɲɥɟɧɧɵɟ ɨɛɪɚɡɰɵ,
ɩɭɧɤɬɢɪɧɚɹɥɚɛɨɪɚɬɨɪɧɵɟ ɨɛɪɚɡɰɵ
15
    2. Ɏɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɚɤɭɭɦɚ

     Ɏɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɩɨɥɭɱɟɧɢɹ ɜɚɤɭɭɦɚ ɩɨɡɜɨɥɹɸɬ ɫɨɡɞɚɜɚɬɶ
ɧɚɫɨɫɵ ɫ ɥɭɱɲɢɦɢ, ɱɟɦ ɭ ɦɟɯɚɧɢɱɟɫɤɢɯ, ɜɚɤɭɭɦɧɨ-ɬɟɯɧɢɱɟɫɤɢɦɢ ɩɨɤɚɡɚ-
ɬɟɥɹɦɢ. ɋɭɳɟɫɬɜɟɧɧɵɦ ɩɪɟɢɦɭɳɟɫɬɜɨɦ ɬɚɤɢɯ ɧɚɫɨɫɨɜ ɹɜɥɹɟɬɫɹ ɭɫɬɪɚɧɟɧɢɟ
ɡɚɝɪɹɡɧɟɧɢɹ ɨɬɤɚɱɢɜɚɟɦɨɝɨ ɨɛɴɟɦɚ ɩɚɪɚɦɢ ɪɚɛɨɱɢɯ ɠɢɞɤɨɫɬɟɣ, ɢɫɩɨɥɶɡɭɟ-
ɦɵɯ ɜ ɦɟɯɚɧɢɱɟɫɤɢɯ ɧɚɫɨɫɚɯ ɞɥɹ ɫɦɚɡɤɢ ɢ ɝɟɪɦɟɬɢɡɚɰɢɢ.
     ɍɫɥɨɜɧɨɟ ɝɪɚɮɢɱɟɫɤɨɟ ɢɡɨɛɪɚɠɟɧɢɟ ɧɚɫɨɫɨɜ, ɪɚɛɨɬɚɸɳɢɯ ɧɚ ɩɪɢɧɰɢ-
ɩɚɯ ɮɢɡɢɤɨ-ɯɢɦɢɱɟɫɤɨɣ ɨɬɤɚɱɤɢ, ɩɪɢɜɟɞɟɧɵ ɧɚ ɪɢɫ. 10, ɚ ɞɢɚɩɚɡɨɧɵ ɪɚɛɨ-
ɱɢɯ ɞɚɜɥɟɧɢɣ ɩɪɨɦɵɲɥɟɧɧɵɯ ɢ ɥɚɛɨɪɚɬɨɪɧɵɯ ɨɛɪɚɡɰɨɜ ɩɨɤɚɡɚɧɵ ɧɚ
ɪɢɫ. 11.




                                                            NM

     Ɋɢɫ. 10. ɍɫɥɨɜɧɵɟ ɝɪɚɮɢɱɟɫɤɨɟ ɢ ɬɟɤɫɬɨɜɨɟ (NA, NG, NC, NE, NM) ɢɡɨ-
ɛɪɚɠɟɧɢɹ ɧɚɫɨɫɨɜ (NA – ɚɞɫɨɪɛɰɢɨɧɧɵɣ, NG – ɝɟɬɬɟɪɧɵɣ, NC – ɤɪɢɨɫɨɪɛɰɢɨɧ-
                                  ɧɵɣ,
               NE – ɢɨɧɧɨ-ɫɨɪɛɰɢɨɧɧɵɣ, NM – ɦɚɝɧɢɬɨɪɚɡɪɹɞɧɵɣ)




Ɋɢɫ. 11. Ⱦɢɚɩɚɡɨɧɵ ɪɚɛɨɱɢɯ ɞɚɜɥɟɧɢɣ ɜɚɤɭɭɦɧɵɯ ɧɚɫɨɫɨɜ, ɪɚɛɨɬɚɸɳɢɯ ɧɚ ɮɢɡɢ-
 ɤɨ-ɯɢɦɢɱɟɫɤɢɯ ɦɟɬɨɞɚɯ ɨɬɤɚɱɤɢ: ɫɩɥɨɲɧɚɹ ɥɢɧɢɹ - ɩɪɨɦɵɲɥɟɧɧɵɟ ɨɛɪɚɡɰɵ,
                    ɩɭɧɤɬɢɪɧɚɹ – ɥɚɛɨɪɚɬɨɪɧɵɟ ɨɛɪɚɡɰɵ

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