Наклонная ионная имплантация. Бормонтов Е.Н - 18 стр.

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18
б)
NnCreateMeshNfx1, x2, y1, y2,():=
y28m⋅:=y16.5m⋅:=
x24m⋅:=x10m⋅:=
Nfxy,()
Nx10
7−
⋅
()
2
2erfc
y10
7−
⋅ a''x10
7−
⋅
()
−
2∆R't⋅
−
⋅ Nm
1−
⋅:=
Nx()Nme
xRpcos θ()⋅− ()
2
2∆R
2
⋅
−
⋅:=
Nm
Q
2π ∆R⋅
:=
a''x()xd+()tan θ
()
⋅:=a'x()xtan θ
()
⋅:=∆ R't ∆Rtsin θ
()
⋅:=
∆R ∆Rp
2
cos θ
()
2
⋅
1
2
∆Rt
2
sin θ
()
2
⋅+:=
∆Rt5.310
6−
× cm:=∆ Rp4.9910
6−
× cm:=Rp1.58610
5−
× cm:=
Q1506.25⋅ 10
12
⋅ cm
2−
:=d410
4−
⋅ cm:=θ 10
π
180
⋅:=
                                                       18




б)
               π                          −4                                          12   −2
 θ := 10 ⋅               d := 4 ⋅ 10 cm                Q := 150 ⋅ 6.25 ⋅ 10 cm
              180
                             −5                                  −6                              −6
 Rp := 1.586 × 10 cm                   ∆Rp := 4.99 × 10 cm ∆Rt := 5.3 × 10 cm


 ∆R := ∆Rp ⋅ cos ( θ ) +                       ∆Rt ⋅ sin ( θ )
                   2              2        1       2             2
                                           2
 ∆R't := ∆Rt ⋅ sin ( θ )           a'( x) := x ⋅ tan ( θ )           a''( x) := ( x + d ) ⋅ tan ( θ )
                                                                                  2
                     Q                                      ( x− Rp ⋅cos( θ ) )
     Nm :=                                              −
                                                                         2
                                                                  2⋅∆R
               2π ⋅ ∆R            N( x) := Nm ⋅ e

                         (
                       N x ⋅ 10
                                  −7  )               y ⋅ 10− 7 − a''( x ⋅ 10− 7)  
     Nf( x, y ) :=                        ⋅  2 − erfc                               ⋅ Nm− 1
                              2                                2 ⋅ ∆R't           
      x1 := 0 ⋅ m                      x2 := 4 ⋅ m
      y1 := 6.5 ⋅ m                    y2 := 8 ⋅ m

      Nn := CreateMesh ( Nf , x1, x2, y1 , y2)

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